NDLI: High-pressure microfluidic systems (HPMS): flow and cavitation measurements in supported silicon microsystems

Content Provider	Springer Nature Link
Author	Gothsch, Thomas Schilcher, Christiane Richter, Claudia Beinert, Stefan Dietzel, Andreas Büttgenbach, Stephanus Kwade, Ar
Copyright Year	2014
Abstract	Conventionally fabricated silicon microfluidic systems with glass coverage were stabilized by a specially developed frame to withstand high-pressure drops of up to 500 bar. Velocity measurements were carried out with an optical non-intrusive measurement technique (μPIV) to characterize the flow in the microfluidic systems. High-pressure applications in microsystems differ compared to more conventional microfluidic applications especially in the higher Reynolds numbers up to 11,500, higher shear forces and the presence of hydrodynamic cavitation. In order to characterize the cavitation phenomena, a photo-optical cavitation measurement technique on the basis of a μPIV setup was applied to visualize the cavitation pattern. The flow of a T- and an orifice geometry were investigated. It was found out that hydrodynamic cavitation, which is a source of abrasion, influences the flow to a great extent and, in orifice geometries, also the volume flow. By applying a backpressure cavitation could be decreased and, at a sufficiently high backpressure, eliminated. Besides the photo-optical cavitation measurements, volume flow measurements could be used to determine the critical backpressure at which cavitation is restricted to the vena contracta in orifice microchannels. With the presented techniques, beginning with the micro fabrication process over the external stabilization up to the high-speed flow characterization, a concept of a high-pressure microfluidic system is introduced, which is suitable for a wide range of applications in research and process development in high-pressure microsystems.
Starting Page	121
Ending Page	130
Page Count	10
File Format	PDF
ISSN	16134982
Journal	Microfluidics and Nanofluidics
Volume Number	18
Issue Number	1
e-ISSN	16134990
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2014-05-22
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	High pressure Cavitation Orifice Turbulence μPIV Silicon microsystem HPMS Engineering Fluid Dynamics Biomedical Engineering Analytical Chemistry Nanotechnology and Microengineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Materials Chemistry Condensed Matter Physics Electronic, Optical and Magnetic Materials

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