NDLI: Development of micro-vibrating flow pumps using MEMS technologies

Content Provider	Springer Nature Link
Author	Osman, Osman Omran Shintaku, Hirofumi Kawa, Satoyuki
Copyright Year	2012
Abstract	In the present paper, we propose a micro-vibrating flow pump (micro-VFP), which is a novel micropump. The micro-VFP is constructed using an actively vibrating valve that has a cantilever-like structure fixed on a wall of a microchannel and a slit orifice downstream. The slit orifice is designed to make the flow asymmetric around the vibrating valve and to effectively generate a net flow in one direction. At the same time, the valve works as an actuator to induce liquid flow in the microchannel. Since the valve is made of a flexible material including magnetic particles, it is manipulated by changing the magnetic field from outside the micro-VFP. This design allows external operation of the micro-VFP without any electrical or mechanical connections. In addition, the micro-VFP, which realizes pumping with a chamber free design, is advantageous for implementation in a small space. In order to demonstrate its basic pumping performance, a prototype micro-VFP was fabricated in a microchannel with a cross section of 240 μm × 500 μm using microelectromechanical systems technologies. The vibration characteristics of the valve were investigated using a high-speed camera. The pump performance at various actuation frequencies in the range of 5 to 25 Hz was evaluated by measuring the hydrostatic head and the flow rate. The proposed micro-VFP design exhibited an increase in performance with the driving frequency and had a maximum shut-off pressure of 3.8 ± 0.4 Pa and a maximum flow rate of 0.38 ± 0.02 μl/min at 25 Hz. Furthermore, in order to clarify the detailed pumping process, the flow characteristics around the vibrating valve were investigated by analyzing the velocity field based on micron-resolution particle image velocimetry (micro-PIV). The validity of the hydrostatic measurement was confirmed by comparing the volume flow rate with that estimated from micro-PIV data. The present study revealed the basic performance of the developed micro-VFP.
Starting Page	703
Ending Page	713
Page Count	11
File Format	PDF
ISSN	16134982
Journal	Microfluidics and Nanofluidics
Volume Number	13
Issue Number	5
e-ISSN	16134990
Language	English
Publisher	Springer-Verlag
Publisher Date	2012-05-10
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Micropump Vibrating flow pump Valve MEMS Micro-PIV Analytical Chemistry Engineering Fluid Dynamics Nanotechnology and Microengineering Biomedical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Materials Chemistry Condensed Matter Physics Electronic, Optical and Magnetic Materials

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Development of micro-vibrating flow pumps using MEMS technologies

A numerical study on the performance of micro-vibrating flow pumps using the immersed boundary method

Diffuser miniature pump with an extra ferrofluidic valve

Unsteady flow behaviors in an obstacle-type valveless micropump by micro-PIV

A microfluidic flow-converter based on a double-chamber planar micropump

Electroosmotic pumps and their applications in microfluidic systems

Experimental characterization of piezoelectrically actuated micromachined silicon valveless micropump

A novel helical micro-valve for embedded micro-fluidic applications

Coupled vibrations of a magneto-electro-elastic micro-diaphragm in micro-pumps

Development of micro-vibrating flow pumps using MEMS technologies

Similar Documents

Development of micro-vibrating flow pumps using MEMS technologies

A numerical study on the performance of micro-vibrating flow pumps using the immersed boundary method

Diffuser miniature pump with an extra ferrofluidic valve

Unsteady flow behaviors in an obstacle-type valveless micropump by micro-PIV

A microfluidic flow-converter based on a double-chamber planar micropump

Electroosmotic pumps and their applications in microfluidic systems

Experimental characterization of piezoelectrically actuated micromachined silicon valveless micropump

A novel helical micro-valve for embedded micro-fluidic applications

Coupled vibrations of a magneto-electro-elastic micro-diaphragm in micro-pumps

Development of micro-vibrating flow pumps using MEMS technologies