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Error-Compensating Phase Measuring Algorithms in a Fizeau Inter ferometer

Content Provider	Springer Nature Link
Author	Hibi, Kenichi
Copyright Year	1999
Abstract	In phase-shifting Fizeau interferometers, nonlinear motion of the phase shifter and multiple-beam interference are the most common sources of systematic errors affecting high-precision phase measurement. A new class of algorithms with extended compensating capability for these errors is proposed. Measurement errors for the new algorithms and two groups of conventional algorithms: discrete Fourier algorithms and the Schwider-Larkin-Hibino algorithms are estimated as a function of the number of sampled images when these systematic error sources are equally dominant. It is shown that the conventional phase-measuring algorithms produce significant errors when the reflectivity of the testing surface exceeds ten percent. Also, these algorithms have an optimum number of samples at around seven with which the residual errors become minimum. The new class of algorithms shows a substantial reduction of the residual errors when the number of samples exceeds ten. There is no optimum number of samples for the new algorithms. For fewer than six samples, discrete Fourier algorithms which have no error-compensating capability for the nonlinearity of phase modulation give a minimum error.
Starting Page	529
Ending Page	538
Page Count	10
File Format	PDF
ISSN	13406000
Journal	Optical Review
Volume Number	6
Issue Number	6
e-ISSN	13499432
Language	English
Publisher	Springer-Verlag
Publisher Date	1999-01-01
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	phase measurement Fizeau interferometer interferometry phase-shift algorithm nonlinear phase-shift Electromagnetism, Optics and Lasers
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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