NDLI: Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers

Content Provider	Springer Nature Link
Author	Matsuura, Toshiaki Okagaki, Satoru Nakamura, Takaaki Oshikane, Yasushi Iue, Haruyuki Naka, Motohiro Kataoka, Toshihiko
Copyright Year	2007
Abstract	A phase-shifting point diffraction interferometer (PS/PDI) with point sources of two single mode optical fibers has been developed, which will be appropriate for the surface figure measurement of large aperture optics on a sub-nanometer scale. To reduce the measurement error factors, a fiber optic plate (FOP) is used as a projection plane for interference pattern. Errors caused by imperfection of optical alignment, such as position of point sources and tilt of FOP, are minimized by analyzing the measured phase data with an original method. Measurement accuracy in the PS/ PDI is estimated with the interference pattern produced by the two optical fiber sources. If inhomogeneity of the FOP and a systematic error of the PS/PDI are eliminated, the measurement accuracy of the present system is estimated to be less than 4nm P-V and 0.7nm rms, respectively, at a measurement wavelength of 632.8 nm.
Starting Page	401
Ending Page	405
Page Count	5
File Format	PDF
ISSN	13406000
Journal	Optical Review
Volume Number	14
Issue Number	6
e-ISSN	13499432
Language	English
Publisher	Springer-Verlag
Publisher Date	2007-01-01
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	point diffraction interferometry phase-shifting interferometry surface figure measurement diffracted spherical wavefront single-mode optical fiber fiber optic plate Electromagnetism, Optics and Lasers
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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