NDLI: Verticality detection algorithm based on local image sharpness criterion

Content Provider	Springer Nature Link
Author	Zhang, Jin Wang, Zhong Ye, Shenghua Yang, Chun Li, Lin
Copyright Year	2012
Abstract	In the high precision image measurement system, the verticality error between the axis of the shooting system and the measured object can bring error of the measurement result. The high demand of the system’s vertical degree is raised by measure system due to the demands of high precision and disposable full field imaging in the micro-parts imaging measurement. The existing method of optical axis verticality detection cannot meet the demand all. In order to achieve the high-precision adjustment of the system optical axis, the algorithm of detecting verticality based on regional image definition is proposed. First, the objected standard image is divided into fixed area. Then, the object plane is moved from the downside to the upside of the focus plane, meanwhile, recording the definition function values of each standard image region at each step, and fitting out the clearest positions of the regions. Finally, according to the inter-regional relations between the locations and the height difference of the each regional clearest position, the small angle between the optical axis and the measured surface can be calculated. The experiment is based on the given image of lithography template with the scale of 10 μm as move unit, and the results show that this method effective reduced the small angle between the system optical axis and the measured body in high-precision image measuring system, the evaluation accuracy is less than 0.1°, meeting the requirements in high-precision measurement. The proposed method of detecting verticality based on regional image definition can evaluate the verticality error between the axis of the shooting system and the measured object accurately, effectively and conveniently.
Starting Page	173
Ending Page	178
Page Count	6
File Format	PDF
ISSN	10009345
Journal	Chinese Journal of Mechanical Engineering
Volume Number	25
Issue Number	1
Language	English
Publisher	Chinese Mechanical Engineering Society
Publisher Date	2012-01-20
Publisher Place	Beijing
Access Restriction	Subscribed
Subject Keyword	verticality detection image definition optical axis adjustment Electronics and Microelectronics, Instrumentation Theoretical and Applied Mechanics Power Electronics, Electrical Machines and Networks Engineering Thermodynamics, Heat and Mass Transfer Manufacturing, Machines, Tools Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Mechanical Engineering

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