NDLI: Off-Line Metrology on SEM Images Using Gray Scale Morphology

Content Provider	Springer Nature Link
Author	Zois, Elias N. Raptis, Ioannis Anastassopoulos, Vassilis
Copyright Year	2006
Abstract	Discrimination and metrology results of microlithographic patterns from top-down SEM images are explored by means of morphological image analysis. The method relies on the use of various morphological filters on a top down SEM image. The resulted images are segmented in order to derive a quality factor which discriminates the candidate images as under- or fully-developed. Furthermore, the fully developed images are processed in order to extract useful measurements. The proposed image analysis methodology achieves for first time, to the authors’ knowledge, successful off-line discrimination between under-developed and fully-developed cases. For the latter case, the measuring method relies upon the evaluation of the connected regions in the SEM image after segmentation. This is expressed by the Useful Threshold Range (UTR), which corresponds to that specific value of connected regions obtained for the wider range of the threshold. The method is experimentally demonstrated by employing 72 test images from high resolution patterns. The evaluated critical pattern parameters are found in good agreement to those derived from on-line procedures.
Starting Page	323
Ending Page	326
Page Count	4
File Format	PDF
ISSN	00263672
Journal	Microchimica Acta
Volume Number	155
Issue Number	1-2
e-ISSN	14365073
Language	English
Publisher	Springer-Verlag
Publisher Date	2006-04-28
Publisher Place	Vienna
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Analytical Chemistry Inorganic Chemistry Physical Chemistry Characterization and Evaluation Materials Monitoring/Environmental Analysis/Environmental Ecotoxicology
Content Type	Text
Resource Type	Article
Subject	Analytical Chemistry

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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