NDLI: Various replication techniques for manufacturing three-dimensional metal microstructures

Content Provider	Springer Nature Link
Author	Ruprecht, R. Benzler, T. Hanemann, T. Müller, K. Konys, J. Piotter, V. Schanz, G. Schmidt, L. Thies, A. Wöllmer, H. Haußelt, J.
Copyright Year	1997
Abstract	In microsystem technology a large range of different 6materials will be available only after the necessary micromanufacturing techniques have been developed or adapted. Existing manufacturing techniques are structuring or shaping techniques producing three-dimensional microstructures out of silicon (silicon etching, silicon surface micromechanics), mostly unfilled plastics (lithographic techniques, injection molding, hot embossing, reaction molding) or a few pure metals or binary alloys (electroforming).The choice of materials for microcomponents is determined by the function and conditions of use of microsystems. Especially the range of metals is still restricted considerably because the only processes available are electroforming and thin-layer techniques.It is for these reasons that we are developing various processes for manufacturing three-dimensional metal microstructures. In addition to direct electroforming of injection molding lost plastic micromolds, these are a new microcasting process and Micro Metal Injection Molding (Micro MIM). Microstructures have already been molded from mold inserts made by micromechanical cutting or by the LIGA technique. The results achieved, and future prospects, are outlined below.
Starting Page	28
Ending Page	31
Page Count	4
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	4
Issue Number	1
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	1997-12-12
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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A novel method to fabricate complex three-dimensional microstructures

Manufacturing of isolated ceramic microstructures

Microfabrication techniques for producing freestanding multi-dimensional microstructures

Proton micromachining: a new technique for the production of three-dimensional microstructures

Injection molding and related techniques for fabrication of microstructures

Novel fast atom beam (FAB) processes for fabricating functional nanostructures on three-dimensional microstructures

Embossing of 3D ceramic microstructures

Laser bending of etched silicon microstructures

Replication techniques for ceramic microcomponents with high aspect ratios

Various replication techniques for manufacturing three-dimensional metal microstructures

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A novel method to fabricate complex three-dimensional microstructures

Manufacturing of isolated ceramic microstructures

Microfabrication techniques for producing freestanding multi-dimensional microstructures

Proton micromachining: a new technique for the production of three-dimensional microstructures

Injection molding and related techniques for fabrication of microstructures

Novel fast atom beam (FAB) processes for fabricating functional nanostructures on three-dimensional microstructures

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Laser bending of etched silicon microstructures

Replication techniques for ceramic microcomponents with high aspect ratios

Various replication techniques for manufacturing three-dimensional metal microstructures