NDLI: Automated surface micro-machining mask creation from a 3D model

Content Provider	Springer Nature Link
Author	Schiek, Richard L. Schmidt, Rodney C.
Copyright Year	2005
Abstract	We have developed and implemented a method, which given a three-dimensional object can infer from topology the two-dimensional masks needed to produce that object with surface micromachining. The masks produced by this design tool can be generic, process independent masks, or if given process constraints, specific for a target process. This design tool calculates the two-dimensional mask set required to produce a given three-dimensional model by investigating the vertical topology to the model. The 3D model is first separated into bodies that are non-intersecting, made from different materials or only linked through a ground plane. Next, for each body unique vertical cross sections are located and arranged into a tree based on their topological relationship. A branch-wise search of the tree uncovers locations where deposition boundaries must lie and identifies candidate masks creating a generic mask set for the 3D model. Finally, in the last step specific process requirements are considered that may constrain the generic mask set. Constraints can include the thickness or number of deposition layers, specific ordering of masks as required by a process and type of material used in a given layer. Candidate masks are reconciled with the process constraints through a constrained optimization.
Starting Page	204
Ending Page	207
Page Count	4
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	12
Issue Number	3
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2005-10-18
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Topology Mask Mems Design Optimization Operating Procedures, Materials Treatment Mechanical Engineering Nanotechnology Electronics and Microelectronics, Instrumentation
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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