NDLI: Micromechanical force sensors based on SU-8 resist

Content Provider	Springer Nature Link
Author	Jordan, A. Büttgenbach, S.
Copyright Year	2012
Abstract	This paper presents an innovative approach to develop highly sensitive 3D force sensors. In order to increase the probing sensitivity by using a material with low Young’s Modulus, a novel force sensor design based on SU-8 polymer is realized. Therefore, a low cost fabrication process is developed accompanied by design studies and an estimation of mechanical properties of the deforming elements. This paper will present the fabrication process as well as a distinguishing set of test results, analytical results, and simulations on the characterization of the presented SU-8 force sensor. The novel SU-8 design consists of an SU-8 boss-membrane with integrated piezoresistive elements. The SU-8 membranes are structured using photolithography. The SU-8 micromechanical structures are characterized to determine film stresses, bending stiffness, displacement of the stylus, and breaking points. Included in these tests are measurement of the stress behavior at different process steps and simulation of stress distribution in the membrane at different directions of loading. In addition a comparative analytical investigation of the structures is carried out particularly with regard to the displacement of the stylus.
Starting Page	1095
Ending Page	1101
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	18
Issue Number	7-8
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2012-02-11
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Nanotechnology Mechanical Engineering Electronics and Microelectronics, Instrumentation
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Micro molding for double-sided micro structuring of SU-8 resist

Integration method of silicon sensors on SU-8-based microfluidic platforms

SU-8-based rapid tooling for thermal roll embossing

Sidewall slopes and roughness of SU-8 HARMST

Sidewall slopes and roughness of SU-8 HARMST

Polymeric (SU-8) optical microscanner driven by electrostatic actuation

Stress engineering and mechanical properties of SU-8-layers for mechanical applications

A wireless powered fully integrated SU-8-based implantable LC transponder

2-DOF vibratory gyroscope fabricated by SU-8 based UV-LIGA process

Micromechanical force sensors based on SU-8 resist

Similar Documents

Micro molding for double-sided micro structuring of SU-8 resist

Integration method of silicon sensors on SU-8-based microfluidic platforms

SU-8-based rapid tooling for thermal roll embossing

Sidewall slopes and roughness of SU-8 HARMST

Sidewall slopes and roughness of SU-8 HARMST

Polymeric (SU-8) optical microscanner driven by electrostatic actuation

Stress engineering and mechanical properties of SU-8-layers for mechanical applications

A wireless powered fully integrated SU-8-based implantable LC transponder

2-DOF vibratory gyroscope fabricated by SU-8 based UV-LIGA process

Micromechanical force sensors based on SU-8 resist