NDLI: Modeling of an electrostatic torsional micromirror for laser projection system

Content Provider	Springer Nature Link
Author	Marchetti, Eleora Volpi, Emilio Battini, Francesco Bacciarelli, Luca Fanucci, Luca Hofmann, Ulrich
Copyright Year	2010
Abstract	This paper presents the Simulink model of a new 2D torsional scanning micromirror. This micro-opto-electro-mechanical-system (MOEMS) is very important towards the integration into a system on a package of a complete laser projection system. Modeling and simulation of the MOEMS is a key point for the development of the proper micromirror electronic conditioning interface thus reducing time to market and production costs. In literature, there are not exhaustive examples of complete characterizations of 2D torsional scanning micromirrors. The aim of this work is to develop a Simulink model which incorporates the main mechanical and electrostatic parameters of the sensor such as the resonance frequency, the torsional constant and capacitance versus rotation angle characteristic. This model has been successfully verified via experimental measurements and it proved his effectiveness in the development of the relevant electronic conditioning circuitry.
Starting Page	1073
Ending Page	1079
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	16
Issue Number	7
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2010-02-25
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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