NDLI: A study of PZT valveless micropump with asymmetric obstacles

Content Provider	Springer Nature Link
Author	Lee, Ching Jiun Sheen, Horn Jiunn Tu, Zhi Kai Lei, U. Yang, Cheng Ying
Copyright Year	2009
Abstract	The results of a study on a new type of PZT valveless micropump with asymmetric obstacles are presented in this paper. The valveless micropump was made through a MEMS fabrication process by using simply only one photo mask. Asymmetric obstacles are used for the flow directing device instead of the diffuser/nozzle elements used in previous studies. In this study, numerical simulations were also carried out to evaluate the design and the performance of the new micropump. The main feature of the present micropump is that it has a uniform cross-section area across the micro-channel, which gives many advantages. The differential pressure head and the pumping flow rate can be adjusted easily by using obstacles of different shapes and changing the PZT operating frequency without changing the dimensions of the micro-channel. In this experiment, the performance of the micropump was evaluated by measuring the pressure head difference and the flow rate as the input voltage ranged from 20 to 40 V, a range much lower than those in previous studies. The pumping pressure can reach a maximum of 1.2 kPa, and the maximum net volume flow rate is 156 μl/min. These test data indicate that this micropump fulfills the demands for most micro-fluidic systems. Moreover, the present device can be easily applied to complex systems with combinations of several pumps and microchannels in the future.
Starting Page	993
Ending Page	1000
Page Count	8
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	15
Issue Number	7
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2009-04-08
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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