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| Content Provider | Springer Nature Link |
|---|---|
| Author | Heneka, J. Guttmann, M. Plewa, K. Mohr, J. Hanemann, T. Saile, V. |
| Copyright Year | 2013 |
| Abstract | The new modification of the LIGA process “LIGA2.X” is a promising process chain to replicate high accuracy single polymeric LIGA micro parts in large scale to feasible costs. The advantages of this new approach compared to the standard LIGA process are the reduction of fabrication costs, the elimination of any rework after replication, industry suitable mold technology for injection molding using a new developed demolding concept, optimized injection molding parameters for every single cavity, shot volumes of the parts below 0.5 mm3 and a new freedom in the arrangement of structure cavities in multicavity molds. Aspects covered in this paper are the introduction of the complete process chain of the new “LIGA2.X” process and the used mold concept for the micro-män 50 micro injection molding machine. Furthermore replicated single polymeric LIGA microparts fabricated using the new process chain are shown. To conclude, potential process improvements and future work will be outlined. |
| Starting Page | 1955 |
| Ending Page | 1960 |
| Page Count | 6 |
| File Format | |
| ISSN | 09467076 |
| Journal | Microsystem Technologies |
| Volume Number | 20 |
| Issue Number | 10-11 |
| e-ISSN | 14321858 |
| Language | English |
| Publisher | Springer Berlin Heidelberg |
| Publisher Date | 2013-12-10 |
| Publisher Place | Berlin, Heidelberg |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture |
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