NDLI: Fabrication and test of multilayer microcoils with a high packaging density

Content Provider	Springer Nature Link
Author	Ruffert, C. Gatzen, H. H.
Copyright Year	2008
Abstract	In magnetic microactuation, the energy converted by a magnetic microactuator is proportional to its volume (Kohlmeier et al., Microsystem Technol 8(4–5):304–307, 2002a). For that reason, it is desirable not only to choose an actuator’s active part with a sufficient footprint size, but also with a substantial building height. By applying UV depth lithography, such a requirement may be fulfilled. This paper investigates the application of high aspect ratio systems technology to fabricating a compact microcoil as field generating element. The coil has four layers. To take optimal advantage of the building height, the insulation film between the coil layers was kept small by applying a thin Si3N4 layer. The coils are intended for the integration in a magnetic microlevitation system serving as an electromagnetic guide for a linear microhybrid step motor (Budde et al., In: Proceedings of the 9th int. conf. on new actuators, pp 665–668, 2004).
Starting Page	1589
Ending Page	1592
Page Count	4
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	14
Issue Number	9-11
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2008-02-22
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Mechanical Engineering Nanotechnology Electronics and Microelectronics, Instrumentation
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Fabrication of microcoils with narrow and high aspect ratio coil lines

Fabrication of planar and three-dimensional microcoils on flexible substrates

Fabrication of piezoelectric multilayer thin-film actuators

Copper planar microcoils applied to magnetic actuation

MOEMS: packaging and testing

Design, Test, Integration and Packaging of MEMS/MOEMS, 2004

Design, test, integration and packaging of MEMS/MOEMS, 2005

High current densities in copper microcoils: influence of substrate on failure mode

Multilayer high-aspect-ratio RF coil for NMR applications

Fabrication and test of multilayer microcoils with a high packaging density

Similar Documents

Fabrication of microcoils with narrow and high aspect ratio coil lines

Fabrication of planar and three-dimensional microcoils on flexible substrates

Fabrication of piezoelectric multilayer thin-film actuators

Copper planar microcoils applied to magnetic actuation

MOEMS: packaging and testing

Design, Test, Integration and Packaging of MEMS/MOEMS, 2004

Design, test, integration and packaging of MEMS/MOEMS, 2005

High current densities in copper microcoils: influence of substrate on failure mode

Multilayer high-aspect-ratio RF coil for NMR applications

Fabrication and test of multilayer microcoils with a high packaging density