NDLI: A method for determining ultrathin DLC film thickness by spectroscopic ellipsometry

Content Provider	Springer Nature Link
Author	Zhao, J. M. Yang, P.
Copyright Year	2012
Abstract	The accurate measurement of ultrathin DLC overcoat thickness becomes a key factor in the research and fabrication of advanced magnetic recording heads and media with the ever-decreasing head-media spacing. Spectroscopic ellipsometry can meet this requirement when the suitable measurement method is adopted. For ultrathin DLC film, there is the strong correlation between its optical constants and thickness, which makes ellipsometry measurement difficult to yield a unique and accurate solution. In this study, we adopt a combined analytical method to determine ultrathin DLC films with a thickness range of 10–50 Å. The uniqueness and accuracy of the measured thickness are verified by Uniqueness Test tool and X-ray reflectivity (XRR), respectively. The results show that the adopted method is able to uniquely and accurately measure the thickness of ultrathin DLC film. This method is expected to be of value for thickness measurement of other ultrathin dielectric or metallic films.
Starting Page	1455
Ending Page	1461
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	18
Issue Number	9-10
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2012-06-24
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Mechanical Engineering Electronics and Microelectronics, Instrumentation Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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