NDLI: A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology

Content Provider	Springer Nature Link
Author	Yi, F. Peng, L. Zhang, J. Han, Y.
Copyright Year	2001
Abstract	In this paper, a new process to fabricate an electromagnetic stepping micromotor using surface sacrificial layer technology (SSLT) is illustrated, and the SEM photo of the stepping micromotor is showed. The torque of the stepping micromotor with maximum torque of 60 μNm is directly calculated by using electromagnetics laws and the law of conservation of energy. The stator and the shaft and the rotor of the micromotor with the material of nickel are first all fabricated by normal LIGA process at the same time. The sacrificial layer structure with the material of AZ resist is made on the surface of the rotor by using SSLT. The stator and the shaft are fixed together with copper substrate instead of the old Ti substrate by electroplating. After removing the Ti substrate, PMMA resist and the sacrificial layer structure, the rotor is separated from the stator and new copper substrate, and can rotate on the new substrate driven by magnetic force. The four coils with 300 turns each are wound on iron bars by hand using microscope and stepping motor. The bars are assembled by hand into the stator holes from rear of new copper substrate to form a magnetic circuit with the stator and the rotor. A power supply with four consecutive pulses provides the current for the coils wound on the iron bars and produces the magnetic force to drive the rotor to run with the speed of 60 rpm.
Starting Page	103
Ending Page	106
Page Count	4
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	7
Issue Number	3
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2001-10-01
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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