NDLI: Dynamic characterization and modification of dynamic properties of a micro scanner

Content Provider	Springer Nature Link
Author	Veryeri, Ilgar Basdogan, Ipek
Copyright Year	2010
Abstract	Micro electro mechanical systems (MEMS) are used in many application areas in different disciplines and took their place among the most promising technologies. The performance of such systems is primarily related to their dynamical characteristics. This study presents the dynamic characterization techniques that are used to identify the modal parameters of a MEMS device and the methods that can be implemented to change its dynamic response. An electrostatic scanner is chosen as the case study to demonstrate the developed methodologies. Initially, the micro scanner is characterized using experimental modal analysis techniques to obtain frequency response function, modal damping, resonance frequencies, and mode shapes. Then, velocity and position feedback control loops are implemented to the scanner system to alter the damping and stiffness characteristics. A closed-loop Simulink model of the scanner is developed to verify the experimental measurements. Several curve fitting methods are used in order to have an accurate representation of the scanner system. Using the model, the influence of both position and velocity feedback on the effective damping, resonance frequency and the transient behavior of the scanner is investigated. The stability limits of the scanner under velocity feedback are also studied via numerical simulations. Based on the experimental and simulation results, the methodology developed in this study proves itself to be very efficient to alter the dynamical characteristics of the MEMS structures and it can be easily adapted to other MEMS applications.
Starting Page	979
Ending Page	992
Page Count	14
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	16
Issue Number	6
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2010-04-16
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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