NDLI: Properties of M-AFM probe affected by nanostructural metal coatings

Content Provider	Springer Nature Link
Author	Hosoi, A. Hamada, M. Fujimoto, A. Ju, Y.
Copyright Year	2009
Abstract	In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied and characteristics of the AFM probe with different nanostructural metal coating were evaluated in order to understand the performance of the probe for the topography of materials and the propagation of microwave signals. A waveguide was introduced by the sputtering and the electron beam (EB) evaporation technique on the top and bottom surfaces of the GaAs AFM probe with Au or Al film. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam fabrication. It was found that the fabricated probes coated with the Au or Al film have nanometer order resolution. Moreover, using the Au-coating probe formed by the EB evaporation technique, microwave emission was detected successfully at the tip of the probe by approaching an Au film sample.
Starting Page	1233
Ending Page	1237
Page Count	5
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	16
Issue Number	7
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2009-11-29
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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