NDLI: A new monolithic 3-axis thermal convective accelerometer: principle, design, fabrication and characterization

Content Provider	Springer Nature Link
Author	Nguyen, H. B. Mailly, F. Latorre, L. uet, P.
Copyright Year	2014
Abstract	Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. Working principle of these sensors is well known and first MEMS implementations were reported in the late 90’s. Since that time, many single-axis or dual-axis sensors were reported. Therefore, complex assembly operations were needed to implement 3-axis acceleration measurement using two dies or more. The goal of this paper is then to demonstrate out-of-plane sensitivity of a 2-axis thermal convective accelerometer and to present extensively the first monolithic MEMS device allowing acceleration measurements in three orthogonal directions. First, finite element modeling is used to study the impact of geometrical parameters and heating power on sensor performances. Second, a prototype has been designed to prove feasibility of a fully integrated 3-axis sensor obtained by a self-aligned post-CMOS etching of a silicon die. To our knowledge, the presented device is the first 3-axis MEMS sensor manufactured in a standard CMOS technology ever reported in the literature.
Starting Page	1867
Ending Page	1877
Page Count	11
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	21
Issue Number	9
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2014-07-30
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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