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| Content Provider | Springer Nature Link |
|---|---|
| Author | Sharma, Mrigank Cretu, Edmond |
| Copyright Year | 2008 |
| Abstract | The paper presents a combined noise and damping analysis for MEMS structures, based on frequency-dependent behavioral models extracted from finite element simulations. The design of high sensitivity MEMS-based microsystems needs to consider the frequency noise shaping induced by damping phenomena on micro scale motion, for its contribution can be significant in the system level noise analysis. Frequency-dependent behavioral models for squeeze-film damping are generated from finite element analysis simulations. Unlike existing noise analysis reported in literature, based on frequency-independent damping assumption, the paper integrates the damping and noise aspects using the same frequency-dependent models. The results can be used for a noise-based optimization procedure applied to the design of resonating microsensors, as illustrated for the case of a MEMS-based gyroscope. |
| Starting Page | 1129 |
| Ending Page | 1139 |
| Page Count | 11 |
| File Format | |
| ISSN | 09467076 |
| Journal | Microsystem Technologies |
| Volume Number | 15 |
| Issue Number | 8 |
| e-ISSN | 14321858 |
| Language | English |
| Publisher | Springer-Verlag |
| Publisher Date | 2009-01-13 |
| Publisher Place | Berlin, Heidelberg |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture |
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