NDLI: A new electrostatically actuated rotary three-state DC-contact RF MEMS switch for antenna switch applications

Content Provider	Springer Nature Link
Author	Kashani Ilkhechi, Afshin Mirzajani, Hadi Najafi Aghdam, Esmaeil Badri Ghavifekr, Habib
Copyright Year	2015
Abstract	In this paper, we present a novel laterally actuated DC-contact three-state RF MEMS switch. Rotary electrostatic comb-drive actuators which can be rotated both clockwise and anti-clockwise are chosen as the drive mechanism of the switch and are integrated inside of the switch, hence the switch has a very compact structure. The proposed switch is designed in such a way that it can be used in antenna switch applications where having high isolation and low insertion loss are of most important operating characteristics. The switch has three operating states of ON, OFF and deep-OFF. Different FEM simulations are carried out in order to optimize RF and mechanical behavior of the switch. The switch has acceptable RF performance in a frequency range from DC up to 40 GHz with near to zero power consumption. The actuation voltage of the switch is 50 V. The switching time from OFF to ON state or deep-OFF state is 79 µs and return time to OFF state is 130 µs. The switch has an insertion loss less than −0.87 dB up to 40 GHz, and return loss below −21 dB at the same frequency range. The OFF state and deep-OFF state isolations are −35 and −60 dB up to 40 GHz, respectively.
Starting Page	231
Ending Page	243
Page Count	13
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	23
Issue Number	1
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2015-11-06
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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