NDLI: Large-scale segmentation errors in optical gratings and their unique effect onto optical scattering spectra

Content Provider	Springer Nature Link
Author	Heusinger, Martin Flügel Paul, Thomas Zeitner, Uwe Detlef
Copyright Year	2016
Abstract	In this paper, we analyze the influence of large-scale segmentation errors in the morphology of high-performance optical gratings. It is thus assumed that the optical grating under consideration (typical lateral extends S are 10–1000 mm) can be spatially decomposed into a great many but unique sub-segments ( $$\ll S$$ ; typical extends are 10–100 $$μ \mathrm{m}$$ ). Any violation of the perfect periodicity will result in the generation of stray light, especially Rowland ghosts, which radiate into a small angular region around the grating’s diffraction orders. In this paper, we focus on three different kinds of segmentation errors. On the one hand, there are statistic as well as deterministic alignment errors between otherwise perfect sub-segments. On the other hand, we analyze the effect of chirping of geometrical parameters, i.e., the groove width, within every sub-segment. Most importantly, we find that the particular type of imperfection results in a unique characteristic of the according stray light spectrum which thus acts as a fingerprint. We come to this conclusion on three different ways. First, we rely on a simple theoretical model that is based on scalar diffraction theory. Second, we have performed rigorous numerical simulations for a high aspect ratio purely dielectric spectrometer grating ( $$\hbox {period} = {667}\,\mathrm{nm}$$ ). Third, the very same grating was then fabricated by e-beam lithography and its stray light spectrum was measured with a purposely designed optical setup. Eventually, all different routes to analyze the problem turn out to be in very good agreement, and we are confident that stray light measurements can be used as an important tool in the detection of fabrication imperfections.
Starting Page	1
Ending Page	12
Page Count	12
File Format	PDF
ISSN	09462171
Journal	Applied Physics B
Volume Number	122
Issue Number	8
e-ISSN	14320649
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2016-07-30
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Physics Physical Chemistry Laser Technology, Photonics Quantum Optics Optics, Optoelectronics, Plasmonics and Optical Devices Engineering
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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