NDLI: Fabrication and stitching of embedded multi-layer micro-gratings in fused silica glass by fs laser pulses

Content Provider	Springer Nature Link
Author	Liu, J. Zhang, Z. Lu, Z. Xiao, G. Sun, F. Chang, S. Flueraru, C.
Copyright Year	2006
Abstract	Fabrication and stitching of internal 2D, 1D and multi-layer micro-gratings in fused silica glass using amplified Ti:sapphire femtosecond laser were reported. These gratings have the pitch of 4 μm and the size of 400 μm×400 μm. For a two-layer 1D micro-grating where a second-layer grating was overwritten on a first-layer grating at the exact X,Y position and the different Z depth, the diffraction efficiency can reach more than 25% due to the grating thickness increase. If a second-layer grating was stitched with a first-layer by the shift of 2 μm in the X direction and at the different Z depth, the diffraction angle was doubled but the diffraction efficiency was about 9%. The last result has the potential application for fabricating high-density micro-/nano-structures beyond the diffraction limit through 3D stitching.
Starting Page	151
Ending Page	154
Page Count	4
File Format	PDF
ISSN	09462171
Journal	Applied Physics B
Volume Number	86
Issue Number	1
e-ISSN	14320649
Language	English
Publisher	Springer-Verlag
Publisher Date	2006-09-01
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Physics and Applied Physics in Engineering Optical Spectroscopy, Ultrafast Optics Quantum Optics, Quantum Electronics, Nonlinear Optics Laser Technology and Physics, Photonics Physical Chemistry Electromagnetism, Optics and Lasers
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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