NDLI: High-aspect-ratio, high-quality microdrilling by electron density control using a femtosecond laser Bessel beam

Content Provider	Springer Nature Link
Author	Xie, Qian Li, Xiaowei Jiang, Lan Xia, Bo Yan, Xueliang Zhao, Weiwei Lu, Yongfeng
Copyright Year	2016
Abstract	We propose an efficient microdrilling method of high-aspect-ratio, high-quality microholes in polymethyl methacrylate by controlling localized transient spatial electron density using single-pulse femtosecond laser Bessel beams. The microholes fabricated with diameters of 1.5–2.4 μm are taper-free, which are of much better quality in the entrances and sidewalls, as compared with those fabricated by Gaussian beams. The aspect ratio of the microholes is up to 330:1. It takes 42 min to fabricate a 501 × 501 microhole array (with 251,001 holes in total, about 100 holes per second under a repetition rate of 100 Hz) in a 1 cm × 1 cm area, which is very uniform in size and shape. For single-pulse drilling of a microhole array, the number of ultrahigh-aspect-ratio microholes processed per second is theoretically determined by the repetition rate. The liquid infiltration method and cross-sectional profile tests confirm hollow microhole drillings rather than material modifications. The theoretical simulation of optical intensity distribution and intensified charge-coupled device detection shows that fabricating such thin, long, uniform microholes using Bessel beams is attributed to electron density control by spatially shaping femtosecond laser pulses.
Starting Page	1
Ending Page	8
Page Count	8
File Format	PDF
ISSN	09478396
Journal	Applied Physics A
Volume Number	122
Issue Number	2
e-ISSN	14320630
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2016-02-10
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Condensed Matter Physics Optical and Electronic Materials Nanotechnology Characterization and Evaluation of Materials Surfaces and Interfaces, Thin Films Operating Procedures, Materials Treatment
Content Type	Text
Resource Type	Article
Subject	Chemistry Materials Science

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