NDLI: Formation of pyramid-like nanostructures in MBE-grown Si films on Si(001)

Content Provider	Springer Nature Link
Author	Galiana, N. Martin, P. P. Garzón, L. Rodríguez Cañas, E. Munuera, C. Esteban Betegón, F. Varela, M. Ocal, C. Alonso, M. Ruiz, A.
Copyright Year	2010
Abstract	The growth of Si homoepitaxial layers on Si(001) substrates by molecular beam epitaxy is analyzed for a set of growth conditions in which diverse nanometer-scale features develop. Using Si substrates prepared by exposure to HF vapor and annealing in ultra-high vacuum, a rich variety of surface morphologies is found for different deposited layer thicknesses and substrate temperatures in a reproducible way, showing a critical dependence on both. Arrays of 3D islands (truncated pyramids), percolated ridge networks, and square pit (inverted pyramid) distributions are observed. We analyze the obtained arrangements and find remarkable similarities to other semiconductor though heteroepitaxial systems. The nanoscale entities (islands or pits) display certain self assembly and ordering, concerning size, shape, and spacing. Film growth sequence follows the ‘islands–coalescence–2D growth’ pathway, eventually leading to optimum flat morphologies for high enough thickness and temperature.
Starting Page	731
Ending Page	738
Page Count	8
File Format	PDF
ISSN	09478396
Journal	Applied Physics A
Volume Number	102
Issue Number	3
e-ISSN	14320630
Language	English
Publisher	Springer-Verlag
Publisher Date	2010-08-05
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Operating Procedures, Materials Treatment Surfaces and Interfaces, Thin Films Characterization and Evaluation of Materials Nanotechnology Optical and Electronic Materials Condensed Matter Physics
Content Type	Text
Resource Type	Article
Subject	Chemistry Materials Science

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Formation of pyramid-like nanostructures during cobalt film growth by magnetron sputtering

In situ RHEED analysis of epitaxial Gd2O3 thin films grown on Si (001)

Surface Reconstruction of Pt/Si(001)

Polarized Raman spectroscopy study of NiSi film grown on Si(001) substrate

GaN and InN nanowires grown by MBE: A comparison

Corn-like indium tin oxide nanostructures: fabrication, characterization and formation mechanism

Carbon nanostructures grown with electron and ion beam methods

Zinc oxide nanostructures grown by pulsed laser deposition

Indium oxide nanostructures

Formation of pyramid-like nanostructures in MBE-grown Si films on Si(001)

Similar Documents

Formation of pyramid-like nanostructures during cobalt film growth by magnetron sputtering

In situ RHEED analysis of epitaxial Gd2O3 thin films grown on Si (001)

Surface Reconstruction of Pt/Si(001)

Polarized Raman spectroscopy study of NiSi film grown on Si(001) substrate

GaN and InN nanowires grown by MBE: A comparison

Corn-like indium tin oxide nanostructures: fabrication, characterization and formation mechanism

Carbon nanostructures grown with electron and ion beam methods

Zinc oxide nanostructures grown by pulsed laser deposition

Indium oxide nanostructures

Formation of pyramid-like nanostructures in MBE-grown Si films on Si(001)