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| Content Provider | Springer Nature Link |
|---|---|
| Author | Siegert, M. Zander, W. Lisoni, J. Schubert, J. Buchal, Ch. |
| Copyright Year | 1999 |
| Abstract | A novel off-axis pulsed-laser deposition (PLD) system for ferroelectric oxide thin films has been developed. The substrates are mounted “upside-down” and are rotating. The maximum substrate size is 2 inches in diameter. The optical and structural properties of the grown BaTiO3 films are compared to the films produced by an on-axis PLD system. The stoichiometry and thickness were checked with Rutherford backscattering spectrometry (RBS). The crystalline quality and orientation were investigated with X-ray diffraction (XRD) and Rutherford backscattering spectrometry in channeling configuration (RBS/C). Using atomic force microscopy, the rms surface roughness was measured. The BaTiO3 films grown on MgO form a planar optical waveguide. The optical losses and the refractive indices of these waveguides were determined with a prism coupling setup.Films grown on 10×10 mm2 MgO (100) substrates in on-axis geometry show optical waveguide losses less than 3 dB/cm. |
| Starting Page | S779 |
| Ending Page | S781 |
| File Format | |
| ISSN | 09478396 |
| Journal | Applied Physics A |
| Volume Number | 69 |
| Issue Number | 1 |
| e-ISSN | 14320630 |
| Language | English |
| Publisher | Springer-Verlag |
| Publisher Date | 1999-12-01 |
| Publisher Place | Berlin, Heidelberg |
| Access Restriction | One Nation One Subscription (ONOS) |
| Content Type | Text |
| Resource Type | Article |
| Subject | Chemistry Materials Science |
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