NDLI: Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass

Content Provider	Springer Nature Link
Author	Hwang, D.J. Choi, T.Y. Grigoropoulos, C.P.
Copyright Year	2004
Abstract	Ultra-short-pulse lasers have proved to be effective tools for micromachining a wide range of materials. When the ultra-short laser pulse is focused inside the bulk of a transparent medium, nonlinear absorption occurs only near the focal volume that is subjected to high intensity. Three-dimensional structures can be fabricated inside transparent materials by taking advantage of this volumetric absorption. In this paper, femtosecond laser pulses were used to fabricate straight and bent through-channels. Drilling was initiated from the rear surface to preserve consistent absorption of the laser pulse. When the debris was not removed efficiently, variation of the channel diameter and occasional termination of the drilling process were observed. Machining in the presence of a liquid and additional use of ultrasonic wave agitation facilitated the debris ejection. The machined channels had diameters on the order of tens of microns, high aspect ratios, and good wall-surface quality.
Starting Page	605
Ending Page	612
Page Count	8
File Format	PDF
ISSN	09478396
Journal	Applied Physics A
Volume Number	79
Issue Number	3
e-ISSN	14320630
Language	English
Publisher	Springer-Verlag
Publisher Date	2004-03-23
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Content Type	Text
Resource Type	Article
Subject	Chemistry Materials Science

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Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass