NDLI: Thermal stress fracture mode of CO2 laser cutting of aluminum nitride

Content Provider	Springer Nature Link
Author	Molian, Raathai Shrotriya, Pranav Molian, Pal
Copyright Year	2007
Abstract	A thermal stress fracture mode of material removal by laser cutting was conducted in 1-mm thick wafers of aluminum nitride (AlN) using a continuous wave CO2 laser with a defocused beam. In this mode, a thin layer (10–20 μm) of AlN surface was melted in an oxygen environment to form aluminum oxide. Solidification of the melt layer coupled with thermal expansion mismatch generated thermal stresses that in turn created a crack along the middle path of the laser beam, resulting in material separation. Thermochemical modeling of laser heating, oxide forming, and subsequent cooling of AlN was performed to validate the formation of cracks as well as material separation through unstable crack propagation. A comparison with the conventional “evaporation/melt and blow” laser cutting method showed that the thermal stress method offers significant benefits such as improved precision, better cut quality, higher cutting speed, and lower energy losses.
Starting Page	725
Ending Page	733
Page Count	9
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	39
Issue Number	7-8
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2007-11-06
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Aluminum nitride Cutting Laser Thermal stress Electronic ceramic Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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