NDLI: Grey forecasting run-to-run control system in copper chemical mechanical polishing

Content Provider	Springer Nature Link
Author	Wang, Gou Jen Wang, Ming Tzong Yang, Feng Cheng Huang, Min Liang Loh, Kou Ning Chen, Jacob
Copyright Year	2008
Abstract	In this paper, an online grey forecasting run-to-run control system was proposed with the integration of run-to-run control system, recursive least-squares (RLS) algorithm, and grey forecasting model (GFM). One of the objectives of this study is to explore the possibility and feasibility of applying GFM to run-to-run control system in copper chemical mechanical polishing. Under the condition of limited experiment data, GFM is excellent at estimating and forecasting error of the next batch online. To keep the process under control, the controllers are then employed to adjust the process parameters in order to compensate the error. In addition, the RLS algorithm is used to construct dynamically a system estimation matrix for the purpose of stating precisely the relationship between process quality and process parameters, and to consequently improve processing performances. From the computer simulation and the experiment results, the proposed new method developed in this study was able not only to confine the processing performances’ error within the range of 5% but also to supplement, when the process parameters are saturated, the control capability through adjusting other unsaturated process parameters, thus maintaining good processing performances.
Starting Page	48
Ending Page	56
Page Count	9
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	41
Issue Number	1-2
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2008-06-18
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Copper chemical mechanical polishing (CMP) Run-to-run process control Grey forecasting model (GFM) Recursive least-squares (RLS) algorithm Semiconductors Forecast Simulations Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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