NDLI: Control of microstructure shape and morphology in femtosecond laser ablation of imprint rollers

Content Provider	Springer Nature Link
Author	Wang, Wenjun Mei, Xuesong Jiang, Gedong
Copyright Year	2008
Abstract	With increasing demand for microstructure shape accuracy for MEMS and optoelectronic devices, controllability of shape and morphology in micro-fabrication has become increasingly crucial. In this paper, the effects of processing parameters on the shape and morphology of microstructures in femtosecond laser fabrication of imprint roller are explored. An optimized fabrication process is proposed to acquire high accuracy microstructures, in which a two-step inclination ablation process and optimal laser focus position are adopted. Adjusting and matching the processing parameters is a basic method to acquire well-defined shapes, but the ablation results indicate that the draft angle of microstructures can only be adjusted in a limited range due to the intensity distribution of laser beam. A two-step inclination ablation process is adopted to increase the draft angle. In the two-step inclination ablation process, the laser beam irradiates the target surface with an angle and the microstructure with a much steeper draft angle forms after the two-step fabrication. Laser focus position is explored as an important parameter affecting the morphology, and an optimal laser focus position is obtained to enhance the ablation quality. By matching the laser fluence and laser focus position, this morphology enhancement method can realize the high-quality ablation of microstructures with a wide range of dimensions without changing the focusing objective lens.
Starting Page	504
Ending Page	512
Page Count	9
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	41
Issue Number	5-6
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2008-04-26
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Femtosecond laser Ablation Microstructure Morphology Shape Process control Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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