NDLI: The dynamic analysis of the gas lubricated stage in optical lithography

Content Provider	Springer Nature Link
Author	He, Xueming Chen, Xuedong
Copyright Year	2006
Abstract	To identify the model and study the possibility of chaotic motion of the gas lubricated stage, the dynamical behavior of the stage with gas-lubricated bearings in optical lithography is studied theoretically and experimentally. A model of the bearing is established by a single mode approximation using the Navier-stokes equation and the Newton equation. The setup of the stage is dragged by a linear motor, and its positions in three directions are detected by three laser interferometers. Analysis of the dynamics of the stage is carried out too. The results show that the amplitude frequency response of the stage is largely affected by the nonlinear air bearings, and the positioning accuracy is affected by the gap of the air bearings, as well as the control method. So the suitable gap of the air bearing should be taken into account when designing and manufacturing the ultra precision positioning stage.
Starting Page	978
Ending Page	984
Page Count	7
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	32
Issue Number	9-10
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2006-03-07
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Dynamical analysis Gas lubricated bearing Ultra precision positioning stage Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Development and application of an ultra-precision lathe

Shaft misalignment effect on bearings dynamical behavior

New approaches for an automated production in ultra-precision machining

Study of cutting force in ultra-precision raster milling of V-groove

An integrated system for ultra-precision machine tool design in conceptual and fundamental design stage

An automatic leveling method for the stage of precision machining center

Reverse analysis on the geometric errors of ultra-precision machine

Precision measures for processes with multiple manufacturing lines

Volumetric error modeling and sensitivity analysis for designing a five-axis ultra-precision machine tool

The dynamic analysis of the gas lubricated stage in optical lithography

Similar Documents

Development and application of an ultra-precision lathe

Shaft misalignment effect on bearings dynamical behavior

New approaches for an automated production in ultra-precision machining

Study of cutting force in ultra-precision raster milling of V-groove

An integrated system for ultra-precision machine tool design in conceptual and fundamental design stage

An automatic leveling method for the stage of precision machining center

Reverse analysis on the geometric errors of ultra-precision machine

Precision measures for processes with multiple manufacturing lines

Volumetric error modeling and sensitivity analysis for designing a five-axis ultra-precision machine tool

The dynamic analysis of the gas lubricated stage in optical lithography