NDLI: Comparison of optical and stylus methods for measurement of surface texture

Content Provider	Springer Nature Link
Author	Vorburger, T. V. Rhee, H. G. Renegar, T. B. Song, J. F. Zheng, A.
Copyright Year	2007
Abstract	Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization for Standardization is addressing standardization issues for areal surface texture measurement and characterization and has formed a project team to address issues posed by the optical methods. In this paper, we review the different methods of measuring surface texture and describe a classification scheme for them. We highlight optical methods and describe some of their characteristics as well as compare surface-profiling results obtained from three optical methods with those obtained from stylus profiler instruments. For moderately rough surfaces (Ra ≈ 500 nm), roughness measurements obtained with white light interferometric (WLI) microscopy, confocal microscopy, and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as about 75% of the value obtained with the stylus method. By contrast, the results for phase shifting interferometry over its expected range of application are in moderately good agreement with those of the stylus method.
Starting Page	110
Ending Page	118
Page Count	9
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	33
Issue Number	1-2
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2007-02-07
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Surface Metrology Stylus Interferometric Microscopy Confocal White light Optical Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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