NDLI: Determination of mask opening size in creating a fluid hole on brittle material by double-side sand blasting

Content Provider	Springer Nature Link
Author	Liao, Y. S. Chen, L. C.
Copyright Year	2006
Abstract	In creating a hole on brittle materials by double-side sand blasting, the rebounding sand particle flux during the process may result in underetching at the edge of the mask opening, and leads to a larger sized fluid hole than the desired one. Determination of the correct mask opening size was made mainly by trial and error in the past. In this paper, relationships between the mask opening size and desired size of a hole on both the front and the back sides of the substrate are derived. For the front side, by taking into account the underetching effect, an equation is derived based on the kinetic energy theory. For the back side, there is negligible rebounding sand particles, and the mask opening size is set to be equal to the desired size of the hole. Experiments were conducted to verify the derived relationships. It is found that the measured sizes of the eroded holes on both the front and the back sides of the wafer substrate are distributed normally. The desired hole sizes deviate slightly from the median of a normal distribution curve, and the maximum predicted errors are 2.4% and 3.0% for front side and the back side sand blasting, respectively. The very satisfactory result together with ANOVA and test of homogeneity of variance of the predicted errors for various hole size shows that the derived relationships is applicable for determination of the mask opening size in the sand blasting process.
Starting Page	511
Ending Page	517
Page Count	7
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	29
Issue Number	5-6
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2006-01-01
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Brittle material Mask Mask opening size Sand blasting Underetching Industrial and Production Engineering Production/Logistics Mechanical Engineering Computer-Aided Engineering (CAD, CAE) and Design
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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