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ITO nanoparticles reused from ITO scraps and their applications to sputtering target for transparent conductive electrode layer
| Content Provider | Semantic Scholar |
|---|---|
| Author | Sung-Jei Song, Sang-Hyun Kim, Byeong Jun Lee, Jae-Yong Kim, Young-Sung |
| Copyright Year | 2017 |
| Abstract | In this study, ITO nanoparticles (ITO-NPs) were reused from ITO target scraps to synthesize low cost ITO-NPs and to apply to make sputtering target for transparent conductive electrodes (TCEs). By controlling heat-treatment temperature as 980 °C, we achieved reused ITO-NPs having Brunauer, Emmett and Teller specific surface area (BET SSA) and average particle size 8.05 m2/g and 103.8 nm, respectively. The BET SSA decreases along with increasing heat-treatment temperature. The ITO-NPs were grown as round mound shape, and highly crystallized to (222) preferred orientations. Also, applying the reused ITO-NPs, we achieved an ITO target of which density was 99.6%. Using the ITO target, we achieved high quality TCE layer of which sheet resistance and optical transmittance at 550 nm were 29.5 Ω/sq. and 82.3%. Thus, it was confirmed that the reused ITO-NPs was feasible to sputtering target for TCEs layer. |
| File Format | PDF HTM / HTML |
| DOI | 10.1186/s40580-017-0117-y |
| PubMed reference number | 28944161 |
| Journal | Medline |
| Volume Number | 4 |
| Alternate Webpage(s) | https://nanoconvergencejournal.springeropen.com/track/pdf/10.1186/s40580-017-0117-y?site=nanoconvergencejournal.springeropen.com |
| Alternate Webpage(s) | https://doi.org/10.1186/s40580-017-0117-y |
| Journal | Nano Convergence |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
