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Simple Fabrication of Nanopyramid Array (NPA) on Si Surface by Means of Focused Ion Beam Patterning and Wet Etching
Content Provider | Semantic Scholar |
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Author | Shinada, Takahiro Sawara, S. Goto, Tomomi Ando, Yasuhisa Ohdomari, Iwao |
Copyright Year | 1999 |
Starting Page | 184 |
Ending Page | 185 |
Page Count | 2 |
File Format | PDF HTM / HTML |
DOI | 10.7567/SSDM.1999.B-7-2 |
Volume Number | 1999 |
Alternate Webpage(s) | https://confit.atlas.jp/guide/event-img/ssdm1999/B-7-2/public/pdf_archive?type=in |
Alternate Webpage(s) | https://doi.org/10.7567/SSDM.1999.B-7-2 |
Language | English |
Access Restriction | Open |
Content Type | Text |
Resource Type | Article |