NDLI: Effect of Xenon Bombardment on Ruthenium-Coated Grazing Incidence Collector Mirror Lifetime for EUV Lithography | NIST

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Effect of Xenon Bombardment on Ruthenium-Coated Grazing Incidence Collector Mirror Lifetime for EUV Lithography | NIST

Content Provider	Semantic Scholar
Author	Nieto, M. Allain, Jean Paul Titov, V. A. Hendricks, Matthew R. Hassanein, Ahmed Rokusek, Daniel Chrobak, Christopher P. Tarrio, Charles S. Barad, Yaniv Grantham, Steven E. Lucatorto, Thomas B. Rice, Bryan J.
Copyright Year	2006
Abstract	The effect of energetic Xenon ion bombardment on the extreme ultraviolet (EUV) reflectivity performance of mirrors is of vital importance for the performance of dischargeand laserproduced plasma extreme ultraviolet lithography (EUVL) sources. To study these effects, we measured absolute and relative reflectivities at the National Institute of Standards and Technology and the Interaction of Materials with Particles and Components Testing facility, to quantify the effects of singly ionized Xe ion bombardment on the reflectivity of Ru EUV mirrors. Results show that unity sputtering is reached at Xe energies near 400-500 eV. The Xe-induced sputter yield decreases an order of magnitude with only a 60% decrease in energy. Incident angle-dependent data of Xe bombardment show that the sputter yield is weakly dependent on angle at energies near 1 keV. Dynamic measurements of in situ EUV reflectivity during Xe irradiation show that the oxygen state of the reflecting mirror has a significant effect on reflectivity performance. For example, 13.5 nm light reflecting from an oxygen-rich mirror
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://info.mcs.anl.gov/pub/tech_reports/reports/P1338.pdf
Alternate Webpage(s)	https://www.mcs.anl.gov/uploads/cels/papers/P1338.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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