NDLI: Construction of a new C ] H ] O ternary diagram for diamond deposition from the vapor phase

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Construction of a new C ] H ] O ternary diagram for diamond deposition from the vapor phase

Content Provider	Semantic Scholar
Author	Eaton, S. Sunkara, Mahendra
Copyright Year	1999
Abstract	A new C]H]O ternary diagram is presented based on radical species composition showing the regions for diamond deposition, non-diamond deposition, and no deposition from the vapor phase. This construction is based on the steady-state computations of gas-phase and gas-surface chemistry from the data points presented in the C]H]O ternary diagram based on feed gas Ž Ž . . composition by Bachmann et al. P.K. Bachmann, D. Leers, H. Lydtin. Diamond Relat. Mater. 1 1991 1 . The analysis of the computational results indicates that the radical species composition does distinguish the three regions and helps explain the contradicting experimental data points using non-typical gas mixtures. The analysis also shows that the revised diagram based on Ž . radical species composition works only when carbon monoxide CO is treated as a non-participating species. The effects of temperature, pressure and flow rates on this new ternary diagram are also detailed. Q 2000 Elsevier Science S.A. All rights
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://eri.louisville.edu/papers_pres/MKS1.pdf
Alternate Webpage(s)	http://pyramid.spd.louisville.edu/~eri/papers_pres/MKS1.pdf
Alternate Webpage(s)	http://www.ee.uofl.edu/~eri/papers_pres/MKS1.pdf
Alternate Webpage(s)	http://pyramid.spd.louisville.edu/~eri/papers_pres/sunk1.pdf
Language	English
Access Restriction	Open
Subject Keyword	Arabic numeral 0 Carbon Dioxide Carbon Monoxide Carpal tunnel syndrome Chemical vapor deposition Composition Computation Data point Diagram Experiment Gases IBM Notes Microwave Phase diagram Physical vapor deposition Revision procedure Steady state Surface Chemistry The Diamond Age mixture
Content Type	Text
Resource Type	Article

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