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Surface Patterning Of Highly Ordered Pyrolytic Graphite
| Content Provider | Semantic Scholar |
|---|---|
| Author | Hicks, Bryan |
| Copyright Year | 2010 |
| Abstract | A depth-controlled process for the tip-based etching of highly ordered pyrolytic graphite has been developed. This process provides unprecedented control on the dimensional parameters of the structures. Arrays of over 100 structures have been fabricated with strict tolerances on the placement, depth, and size of each feature. Custom software provides closed-loop depth control as well as the ability to change the fabrication parameters on-demand, immediately before each feature is made. To date, protrusions, holes, trenches, and even words have been patterned on scales ranging from 1 nm2 to 1 mm2 and depths ranging from sub nm to as deep as 200 nm. A 1.5 μm2 array of 100 holes was fabricated. The average hole depth was 19.9 nm ± 2.2 nm and the average width was 32.2 nm ± 4.4 nm. Additionally, an array of 105 trenches with two different lengths was fabricated. The array was 3.2 μm across and 2.2 μm down. The pitch in the x direction was 350 nm and in the y direction was 155 nm. The two lengths present in the array had an average value of 136 nm for the short lines and 183 nm for the long lines with a variation of 4.4% and 2.7% respectively. BIOGRAPHICAL SKETCH Bryan Thomas Hicks was born in Falls Church, Virginia in 1984. He is the second of four brothers and a baby sister. Bryan was raised by loving parents who were surprised by his fascination with science but were nonetheless convinced he was their son. They enthusiastically helped him with his homework until letters began entering the equations. Undeterred, Bryan went on to graduate from Loveland High School in Ohio, study Physics at Brigham Young University in Utah and enter a PhD program in Electrical and Computer Engineering at Cornell University. His parents continue to support him with polite questions about his studies and he politely keeps his answers short. Bryan is married to his college sweetheart, a former History and ESL teacher who also prefers to keep her numbers and letters separate. They have a baby girl named Norah who is showing an early interest in technology. This work is dedicated to her in full confidence that she will one day understand it and even give her dad a hand with tricky equations from time to time. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://ecommons.cornell.edu/bitstream/handle/1813/17230/Hicks,%20Bryan.pdf?isAllowed=y&sequence=1 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
