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Microstructure evolution and dielectric properties of Ba 0 . 7 Sr 0 . 3 TiO 3 parallel plate capacitor with Cr interlayer
| Content Provider | Semantic Scholar |
|---|---|
| Author | Ho, Choi Yung Chiou, Bi-Shiou Chang, Li-Chun |
| Copyright Year | 2007 |
| Abstract | The microstructure, crystalline phase, surface morphology, and dielectric properties of a sandwich structure of Ba0.7Sr0.3TiO3/Cr/ Ba0.7Sr0.3TiO3 (BST/Cr/BST) dielectric are characterized to understand the influence of the nano-Cr interlayer. BST dielectrics inserted with Cr film of thickness ranged from 2 nm to 15 nm all show the crystalline cubic phase. However, TiO2 layer is formed on the upper BST layer after the BST/Cr/BST dielectrics are annealed at 800 °C in O2 atmosphere for one hour. In this study, TEM, AFM, SEM, X-ray diffraction, and AES are employed to investigate the microstructure evolution of the BST/Cr/BST dielectrics after annealing. The correlations between the microstructure and the dielectric properties of the Pt/BST/Cr/BST/Pt capacitors with various Cr thicknesses are explored. © 2007 Elsevier B.V. All rights reserved. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://www.ir.nctu.edu.tw/bitstream/11536/3708/1/000251618900033.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |