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Anti-stiction Coatings for High Reliability Mems
| Content Provider | Semantic Scholar |
|---|---|
| Author | Gunda, Nilesh V. Jha, Santosh Kumar Sastri, Suri A. |
| Copyright Year | 2003 |
| Abstract | Micro-electromechanical system (MEMS) is a rapidly growing technology with a forecasted annual growth rate exceeding that of the semiconductor electronics industry. Several studies have projected the MEMS market size in tens of billions of dollars in a few years from now. Micro-electromechanical systems (MEMS) are very small, integrated devices that combine electrical and mechanical components and replicate the structure and function of meter-scale devices used in day-to-day life. They range in size from the submicron to the millimeter level. Inkjet-printer cartridges, accelerometers, miniature robots, microengines, inertial sensors, micromirrors, microactuators, optical scanners, fluid pumps, and transducers are some of the examples of current day MEMS device applications. Newer applications are emerging as the existing technology is applied to the miniaturization and integration of conventional devices. Figure 1 shows the secondary electron micrographs (SEM) of some MEMS devices. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.surmet.com/docs/(1)Article_MEMS.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
