NDLI: Constructing multilayers with absorbing materials

Content Provider	Semantic Scholar
Author	Larruquert, Juan I. Vidal-Dasilva, Manuela Garćıa-Cortés, Sergio Fernández-Perea, Mónica Méndez, José Antonio Aznárez, José A.
Copyright Year	2010
Abstract	The strong absorption of materials in the extreme ultraviolet (EUV) above ∼50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of materials with moderate absorption, such as various lanthanides. Based on this research, novel multilayers based on Yb, Al, and SiO have been developed with a narrowband performance in the 50–92 nm range. Furthermore, procedures for the design of multi-material multilayers with absorbing materials have been derived, which resulted in multilayers with enhanced reflectance. OCIS codes: 230.4170 , 260.7200, 340.7470, 350.6090, 220.3740. doi: 10.3788/COL201008S1.0159.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://digital.csic.es/bitstream/10261/72098/1/Larruquert.pdf
Language	English
Access Restriction	Open
Subject Keyword	Aluminum Code Digital Object Identifier Lanthanoid Series Elements Microscopy, Ultraviolet Numerous SIO (software) Yahoo! Briefcase
Content Type	Text
Resource Type	Article

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