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Estimating Particle Temperature for an Argon-oxygen Discharge by Using Langmuir Probe and Optical Emission Spectroscopy 1
| Content Provider | Semantic Scholar |
|---|---|
| Author | Aori, M. Amarandei, George Ivan, Liliana Mihaela Dimitriu, Dan G. Dorohoi, Dana Ortansa |
| Copyright Year | 2005 |
| Abstract | An experimental study of the electron energy distribution function (EEDF) has been carried out. Plasma parameters as plasma potential, electron temperatures, electron densities, are correlated with the elementary processes involved in the discharge. Optical emission intensities of recorded spectral lines for atoms and ions increase with increasing both of power and pressure. Spectra have been recorded from 600 to 900 nm. Using the relationship between the relative intensities of the emission lines the electronic plasma temperature has been calculated for different pressure and powers. One method for characterizing ion and atom energies is to examine the Doppler profile of the emission lines spectra from these species. Ion energies derived from these emission profiles depend on the operating power and pressure. A good concordance between the temperatures estimated using optical emission spectroscopy and the ones calculated for the same device using Langmuir probe measurements was obtained. Those diagnostics are important for characterizing plasma parameters relevant to etching applications [1]. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://physics.sk/aps/pubs/2005/aps-2005-55-6-491.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
