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High-resolution grazing-incidence x-ray diffraction for characterization of defects in crystal surface layers
| Content Provider | Semantic Scholar |
|---|---|
| Author | Kondrashkina, Elena Alekseevna Stepanov, Sergey Aleksandrovich Schmidbauer, M. Opitz, Ricarda Koehler, Rolf Rhan, H. |
| Copyright Year | 1997 |
| Abstract | The peculiarities of high-resolution measurements in grazing-incidence diffraction (GID) are studied, both theoretically and experimentally. It is shown that complete discrimination between coherent reflection and diffuse scattering due to defects in GID requires a three-dimensional mapping of reciprocal space. These measurements can be performed using a combination of analyzer crystal and position-sensitive detector for angular analysis of scattered x-rays in mutually perpendicular planes. The equations for the resolution function of GID experiments are given and applied to the interpretation of GID measurements taken from an AlAs/GaAs superlattice. The discrimination of diffuse scattering due to interfacial roughness in the superlattice is demonstrated. |
| Starting Page | 175 |
| Ending Page | 183 |
| Page Count | 9 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.363838 |
| Alternate Webpage(s) | http://x-server.gmca.aps.anl.gov/pub/Stepanov_JAP_1997_01.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.363838 |
| Volume Number | 81 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |