NDLI: Nucleation and growth of amorphous carbon film on tungsten-implanted stainless steel substrates

Content Provider	Semantic Scholar
Author	Xu, Ming Li, Liuhe Liu, Youming Chen, Qiulong Guo, Junxia Chu, Paul K.
Copyright Year	2006
Abstract	Amorphous carbon (a-C) films were deposited on W-implanted (20 kV, 3×10 17 ions cm �2 ) and un-implanted steel substrates by plasma immersion ion implantation and deposition (PIII&D). The W implantation pretreatment changes the surface structure and impacts film nucleation. Consequently, the growth mechanism of the a-C film is altered resulting in different surface morphologies and roughnesses even though the films deposited on the un-implanted steel substrates possess similar a-C structures as revealed by Raman spectroscopy. The structural differences are probed by X-ray photoelectron spectroscopy and X-ray diffraction. Moreover, microstructural observations were carried out by transmission electron microscopy. A model based on the statistical formation theory is proposed to explain the growth of the a-C films on the implanted and unimplanted substrates.
Starting Page	1580
Ending Page	1584
Page Count	5
File Format	PDF HTM / HTML
DOI	10.1016/j.diamond.2005.12.053
Volume Number	15
Alternate Webpage(s)	http://www.cityu.edu.hk/phy/appkchu/Publications/2006/06.70.pdf
Alternate Webpage(s)	https://doi.org/10.1016/j.diamond.2005.12.053
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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