NDLI: Circular Test Structures for Determining the Specific Contact Resistance of Ohmic Contacts

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Circular Test Structures for Determining the Specific Contact Resistance of Ohmic Contacts

Content Provider	Semantic Scholar
Author	Holland, Anthony S. Alnassar, Mohammad Saleh N. Luong, Stanley W.
Copyright Year	2017
Abstract	Though the transport of charge carriers across a metal-semiconductor ohmic interface is a complex process in the realm of electron wave mechanics, such an interface is practically characterised by its specific contact resistance. Error correction has been a major concern in regard to specific contact resistance test structures and investigations by finite element modeling demonstrate that test structures utilising circular contacts can be more reliable than those designed to have square shaped contacts as test contacts become necessarily smaller. Finite element modeling software NASTRAN can be used effectively for designing and modeling ohmic contact test structures and can be used to show that circular contacts are efficient in minimising error in determining specific contact resistance from such test structures. Full semiconductor modeling software is expensive and for ohmic contact investigations is not required when the approach used is to investigate test structures considering the ohmic interface as effectively resistive.
Starting Page	313
Ending Page	326
Page Count	14
File Format	PDF HTM / HTML
DOI	10.2298/fuee1703313h
Volume Number	30
Alternate Webpage(s)	http://casopisi.junis.ni.ac.rs/index.php/FUElectEnerg/article/download/2534/1604
Alternate Webpage(s)	https://doi.org/10.2298/fuee1703313h
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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