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Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics
| Content Provider | Semantic Scholar |
|---|---|
| Author | Saura, X. Suñé, Jordi Monaghan, Scott Hurley, Paul K. Miranda, Enrique |
| Copyright Year | 2013 |
| Abstract | The breakdown spot spatial distribution in Pt/HfO2/Pt capacitors is investigated using nearest neighbor statistics in combination with more conventional estimation methods such as the point-event and event-event distance distributions. The spots appear as a random point pattern over the top metal electrode and arise as a consequence of significant localized thermal effects caused by the application of high-voltage ramped stress to the devices. The reported study mainly involves the statistical characterization of the distances between each failure site and the nearest, second nearest, … kth nearest event and the comparison with the corresponding theoretical distributions for a complete spatial randomness (CSR) process. A method for detecting and correcting deviations from CSR based on a precise estimation of the average point intensity and the effective damaged device area is proposed. |
| Starting Page | 154112 |
| Ending Page | 154112 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.4825321 |
| Volume Number | 114 |
| Alternate Webpage(s) | https://cora.ucc.ie/bitstream/handle/10468/4722/3065.pdf?isAllowed=y&sequence=1 |
| Alternate Webpage(s) | https://doi.org/10.1063/1.4825321 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
