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Alumnumintride Sintered Body and Semconductor Manufacturing Apparatus Member Cross Reference to Related Application
| Content Provider | Semantic Scholar |
|---|---|
| Copyright Year | 2017 |
| Abstract | (54) ALUMINUM NITRIDE SINTERED BODY AND 6.225,249 B1* 5/2001 Fujita et al. ................ 501,984 SEMCONDUCTOR MANUFACTURING 6,403,510 B1* 6/2002 Kuibira et al. ............. 501,985 APPARATUS MEMBER 6,486,085 B1 1 1/2002 Katsuda et al. 6,607,836 B2 8/2003 Katsuda et al. 75 6,953,761 B2 * 10/2005 Tanaka et al. .............. 501,984 (75) Inventors: Nasrat Nig (JP); Yuji 7,122,490 B2 10/2006 Kobayashi et al. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/8d/9b/ad/7b0250b19d80d3/US7803733.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |