Loading...
Please wait, while we are loading the content...
Similar Documents
Improvement of Thermal Stability of MRAM Device with SiN Protective Film Deposited by HDP CVD
| Content Provider | Semantic Scholar |
|---|---|
| Author | Suemitsu, Katsumi Kawano, Yuichi Utsumi, Hiroaki Honjo, Hiroaki Nebashi, Ryusuke Saito, Shinsaku Ohshima, Norikazu Sugibayashi, Tadahiko Hada, Hiromitsu Nohisa, T. Shimazu, Tadashi Inoue, Masahiko Kasai, Naoki |
| Copyright Year | 2007 |
| Abstract | SiN Protective Film Deposited by HDP CVD Katsumi Suemitsu, Yuichi Kawano, Hiroaki Utsumi, Hiroaki Honjo, Ryusuke Nebashi, Shinsaku Saito, Norikazu Ohshima, Tadahiko Sugibayashi, Hiromitsu Hada, Tatsuhiko Nohisa, Tadashi Shimazu, Masahiko Inoue and Naoki Kasai NEC Corporation, Device Platforms Research Laboratories, 1120 Shimokuzawa, Sagamihara, Kanagawa, 229-1198, Japan Phone: +81-42-771-0631 E-mail: k-suemitsu@bp.jp.nec.com Mitsubishi Heavy Industries, LTD., Semiconductor Manufacturing Equipment Office, 1-1-1 Wadasaki-cho, Hyogo-ku, Kobe, Hyogo 652-8585, Japan |
| Starting Page | 1154 |
| Ending Page | 1155 |
| Page Count | 2 |
| File Format | PDF HTM / HTML |
| DOI | 10.7567/SSDM.2007.J-8-1 |
| Volume Number | 2007 |
| Alternate Webpage(s) | https://confit.atlas.jp/guide/event-img/ssdm2007/J-8-1/public/pdf_archive?type=in |
| Alternate Webpage(s) | https://doi.org/10.7567/SSDM.2007.J-8-1 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |