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Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system
| Content Provider | Semantic Scholar |
|---|---|
| Author | Xu, Su’an Chassagne, Luc Topçu, Suat Chen, Le Le Sun, Jian Yan, Tianhong |
| Copyright Year | 2013 |
| Abstract | This letter presents a polarimetric interferometer (PI) that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm. The PI is constructed and compared with a commercial heterodyne interferometer (HI). Given its low nonlinearity, the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system. A rotating half-wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter. |
| Starting Page | 61201 |
| Ending Page | 61205 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| DOI | 10.3788/col201311.061201 |
| Volume Number | 11 |
| Alternate Webpage(s) | http://www.opticsjournal.net/ViewFull0.htm?aid=OJ1305310000724A7D0F |
| Alternate Webpage(s) | http://www.opticsjournal.net/ViewFullPDF.htm?aid=OJ1305310000724A7D0F |
| Alternate Webpage(s) | https://doi.org/10.3788/col201311.061201 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |