NDLI: AES Analysis of Insulating Oxide Materials by Means of Simultaneous Helium Ion Bombardment

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AES Analysis of Insulating Oxide Materials by Means of Simultaneous Helium Ion Bombardment

Content Provider	Semantic Scholar
Author	Sato, Noritada Saito, Yuko Ueda, Atsushi Nagano, Megumi
Copyright Year	1990
Abstract	(Received August 31, 1990, Accepted November 10, 1990) In Auger electron spectroscopy (AES) on insulating materials, Auger peaks are tend to be disturbed by background noise due to negative charging of the material surface. To suppress this noise, we discribed a method to reduce the surface negative charges by means of simultaneous helium ion bombardment and discussed the mechanism of the surface charge reduction which improve the AES spectrum and AES peak shifts. By neutralizing the negative charges with the optimum amount of helium ion bombardment, maximum AES signal intensity and normal Auger electron energy can be obtained. Excess negative or positive charges disturb the escaping Auger electrons and Auger eneregy due to coulomb force. We estimated the neutralizing effects by examining Auger peak intensity and peak energy at common oxygen Auger peakes of Al203, Si02 and SrTiO3 with various He+ ion beam currents.
Starting Page	928
Ending Page	933
Page Count	6
File Format	PDF HTM / HTML
DOI	10.3131/jvsj.33.928
Volume Number	33
Alternate Webpage(s)	https://www.jstage.jst.go.jp/article/jvsj1958/33/12/33_12_928/_pdf
Alternate Webpage(s)	https://doi.org/10.3131/jvsj.33.928
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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