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Thermal Decomposition of Dichlorosilane Investigated by Pulsed Laser Powered Homogeneous Pyrolysis
| Content Provider | Semantic Scholar |
|---|---|
| Author | Nguyen, Nhan Q. Otter, Malcolm Bouwmeester |
| Abstract | Results of the SF, sensitized infrared pulsed laser powered homogeneous pyrolysis of dichlorosilane are reported. Pyrolyses at temperatures of 1350 to 1700 K and pressures of 150 to 230 Torr with reaction times around 7 ,us were carried out in the presence and absence of molecules that could potentially scavenge the primary decomposition products (SiHCl and/or SiCl 2). We were unable to irreversibly trap the reaction products, but obtained upper limits for the uni-molecular decomposition rate constant under these conditions by measuring reactant loss. The observed rates are consistent with the high activation energy for dichlorosilane decomposition, near 75 kcal/mol, that is predicted by ab initio calculations. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.cbe.buffalo.edu/people/pdfPub.jsp?id=2882 |
| Alternate Webpage(s) | http://www.eng.buffalo.edu/~swihart/Reprints/Swihart_JElectrochemSoc_1997.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
